Patent Assignment
Reel/Frame 016466/0184
Assignment of Assignor's Interest
Recorded: 2005-04-08
Pages: 3
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, OAZA KADOMA, KADOMA-SHI, OSAKA, 571-8501, JAPAN
Covered Property
(1)
Semiconductor manufacturing apparatus and pattern formation method
Application:
11/101,470 →
Publication:
US 2005/0255413
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.