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App. No. 11/101,470 · Confirmation No. 5428

Semiconductor manufacturing apparatus and pattern formation method

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2010-08-05 ABN Abandonment 2 View
2010-01-25 CTNF Non-Final Rejection 8 View
2010-01-25 892 List of references cited by examiner 1 View
2010-01-25 SRNT Examiner's search strategy and results 6 View
2010-01-25 FWCLM Index of Claims 1 View
2010-01-25 SRFW Search information including classification, databases and other search related notes 1 View
2009-08-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2009-08-28 CLM Claims 4 View
2009-08-28 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2009-08-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-08-28 WFEE Fee Worksheet (SB06) 1 View
2009-08-28 WFEE Fee Worksheet (SB06) 1 View
2009-08-12 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2009-06-02 CTNF Non-Final Rejection 10 View
2009-06-02 892 List of references cited by examiner 1 View
2009-06-02 FWCLM Index of Claims 1 View
2009-06-02 SRFW Search information including classification, databases and other search related notes 1 View
2009-06-02 SRNT Examiner's search strategy and results 4 View
2009-05-18 A.NE Response After Final Action 1 View
2009-05-18 CLM Claims 6 View
2009-05-18 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2009-05-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-05-18 WFEE Fee Worksheet (SB06) 1 View
2009-05-15 EXIN Examiner Interview Summary Record (PTOL - 413) 4 View
2009-02-17 CTFR Final Rejection 13 View
2009-02-17 892 List of references cited by examiner 1 View
2009-02-17 FWCLM Index of Claims 1 View
2009-02-17 SRFW Search information including classification, databases and other search related notes 1 View
2009-02-17 1449 List of References cited by applicant and considered by examiner 1 View
2008-11-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-11-19 CLM Claims 7 View
2008-11-19 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2008-11-19 TRAN.LET Transmittal Letter 2 View
2008-11-19 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-11-19 WFEE Fee Worksheet (SB06) 2 View
2008-11-19 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-11-19 WFEE Fee Worksheet (SB06) 1 View
2008-08-21 CTNF Non-Final Rejection 11 View
2008-08-21 892 List of references cited by examiner 1 View
2008-08-21 FWCLM Index of Claims 1 View
2008-08-21 SRFW Search information including classification, databases and other search related notes 1 View
2008-08-21 1449 List of References cited by applicant and considered by examiner 1 View
2008-08-21 1449 List of References cited by applicant and considered by examiner 1 View
2008-08-21 SRNT Examiner's search strategy and results 3 View
2008-07-22 TRAN.LET Transmittal Letter 2 View
2008-07-22 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-07-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-04-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-04-23 CLM Claims 7 View
2008-04-23 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2008-04-23 FRPR Certified Copy of Foreign Priority Application 32 View
2008-04-23 FRPR Certified Copy of Foreign Priority Application 4 View
2008-04-23 TRAN.LET Transmittal Letter 2 View
2008-04-23 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-04-23 FOR Foreign Reference 43 View
2008-04-23 FOR Foreign Reference 17 View
2008-04-23 WFEE Fee Worksheet (SB06) 2 View
2008-04-23 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-04-23 WFEE Fee Worksheet (SB06) 1 View
2008-04-23 WFEE Fee Worksheet (SB06) 1 View
2008-01-23 CTNF Non-Final Rejection 8 View
2008-01-23 1449 List of References cited by applicant and considered by examiner 3 View
2008-01-23 892 List of references cited by examiner 1 View
2008-01-23 FWCLM Index of Claims 1 View
2008-01-23 SRFW Search information including classification, databases and other search related notes 1 View
2008-01-12 SRNT Examiner's search strategy and results 3 View
2007-12-13 ELC. Response to Election / Restriction Filed 1 View
2007-12-13 WFEE Fee Worksheet (SB06) 1 View
2007-11-15 CTRS Requirement for Restriction/Election 5 View
2007-11-15 FWCLM Index of Claims 1 View
2007-11-15 SRFW Search information including classification, databases and other search related notes 1 View
2007-11-15 BIB Bibliographic Data Sheet 1 View
2007-08-22 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2007-08-22 FOR Foreign Reference 19 View
2007-08-22 FOR Foreign Reference 36 View
2007-08-22 FOR Foreign Reference 26 View
2006-12-05 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2006-12-05 FOR Foreign Reference 12 View
2006-12-05 FOR Foreign Reference 14 View
2006-12-05 FOR Foreign Reference 15 View
2006-12-05 FOR Foreign Reference 38 View
2005-04-08 TRNA Transmittal of New Application 2 View
2005-04-08 SPEC Specification 18 View
2005-04-08 CLM Claims 4 View
2005-04-08 ABST Abstract 1 View
2005-04-08 DRW Drawings-only black and white line drawings 7 View
2005-04-08 OATH Oath or Declaration filed 3 View
2005-04-08 WFEE Fee Worksheet (SB06) 1 View
2005-04-08 WFEE Fee Worksheet (SB06) 1 View
2005-04-08 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-04-08 FRPR Certified Copy of Foreign Priority Application 25 View
2005-04-08 136A Authorization for Extension of Time all replies 2 View
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Quick Facts
App. No.
11/101,470
Filed
2005-04-08
Pub. No.
US20050255413A1
Art Unit
1795