Patent Assignment
Reel/Frame 016469/0891
Assignment of Assignor's Interest
Recorded: 2005-04-18
Received: 2005-04-21
Pages: 2
Assignors
HOCHBERG, ARTHUR KENNETH
Executed: 2005-04-06
LEI, XINJIAN
Executed: 2005-04-07
CUTHILL, KIRK SCOTT
Executed: 2005-04-08
THRIDANDAM, HAREESH
Executed: 2005-04-08
Assignee
AIR PRODUCTS AND CHEMICALS, INC.
7201 HAMILTON BOULEVARD, PATENT DEPARTMENT, ALLENTOWN, PA, 18195-1501, UNITED STATES
Covered Property
(1)
Preparation of metal silicon nitride films via cyclic deposition
Application:
11/057,446 →