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App. No. 11/057,446 · Confirmation No. 4168

Preparation of metal silicon nitride films via cyclic deposition

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2009-04-08 CTAV Advisory Action (PTOL-303) 3 View
2009-04-08 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2009-04-03 A.NE Response After Final Action 1 View
2009-04-03 CLM Claims 5 View
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2009-04-03 WFEE Fee Worksheet (SB06) 1 View
2009-02-25 CTFR Final Rejection 7 View
2009-02-25 892 List of references cited by examiner 1 View
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2009-02-25 1449 List of References cited by applicant and considered by examiner 2 View
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2008-12-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
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2008-10-21 CTNF Non-Final Rejection 8 View
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2008-10-21 BIB Bibliographic Data Sheet 1 View
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2008-10-21 SRNT Examiner's search strategy and results 3 View
2008-10-21 1449 List of References cited by applicant and considered by examiner 2 View
2008-10-21 1449 List of References cited by applicant and considered by examiner 2 View
2007-04-24 A.PE Preliminary Amendment 1 View
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2005-02-14 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2005-02-14 136A Authorization for Extension of Time all replies 2 View
2005-02-14 FOR Foreign Reference 10 View
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Quick Facts
App. No.
11/057,446
Filed
2005-02-14
Pub. No.
US20060182885A1
Art Unit
1792