Patent Assignment
Reel/Frame 016492/0655
Assignment of Assignor's Interest
Recorded: 2005-04-22
Pages: 3
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method and System for 3D Alignment in Wafer Scale Integration