Patent Assignment
Reel/Frame 016498/0741
Assignment of Assignor's Interest
Recorded: 2005-04-21
Pages: 3
Assignors
WATANABE, TAKERU
Executed: 2005-03-29
HASEGAWA, KOJI
Executed: 2005-03-29
TAKEMURA, KATSUYA
Executed: 2005-03-29
NODA, KAZUMI
Executed: 2005-03-29
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Nitrogen-Containing Organic Compound, Chemically Amplified Resist Composition and Patterning Process