Patent Assignment
Reel/Frame 016505/0650
Assignment of Assignor's Interest
Recorded: 2004-11-04
Pages: 3
Assignors
MATSUDA, RYUICHI
Executed: 2004-09-06
KAWANO, YUICHI
Executed: 2004-09-08
INOUE, MASAHIKO
Executed: 2004-09-01
Assignee
MITSUBISHI HEAVY INDUSTRIES, LTD.
16-5, KONAN 2-CHOME, MINATO-KU, TOKYO 108-8215, JAPAN
Covered Property
(1)
Method and Device for Measuring Wafer Potential or Temperature