Patent Assignment
Reel/Frame 016508/0962
Assignment of Assignor's Interest
Recorded: 2005-04-28
Pages: 2
Assignors
KOYAMA, HIKARU
Executed: 2005-01-18
NISHIYAMA, HIDETOSHI
Executed: 2005-01-18
NOZOE, MARI
Executed: 2005-01-18
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Inspection Method and Apparatus Using Charged Particle Beam