Patent Assignment
Reel/Frame 016528/0208
Change of Name
Recorded: 2005-05-03
Pages: 13
Assignor
LEO ELEKTRONENMIKROSKOPIE GMBH
Executed: 2004-04-06
Assignee
CARL ZEISS NTS GMBH
CARL-ZEISS-STRASSE 56, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Beam Guiding Arrangement, Imaging Method, Electron Microscopy System and Electron Lithography System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.