Patent Assignment
Reel/Frame 016551/0423
Assignment of Assignor's Interest
Recorded: 2004-10-22
Pages: 2
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Exposure Apparatus and Device Fabrication Method Using the Same