Patent Assignment
Reel/Frame 016552/0698
Assignment of Assignor's Interest
Recorded: 2005-05-09
Pages: 2
Assignors
WEGMANN, ULRICH
Executed: 2005-05-03
HAIDNER, HELMUT
Executed: 2005-04-13
DOERING, GORDON
Executed: 2005-04-21
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Device and Method for the Determination of Imaging Errors and Microlithography Projection Exposure System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.