Patent Assignment
Reel/Frame 016559/0215
Assignment of Assignor's Interest
Recorded: 2005-05-12
Pages: 3
Assignor
MIYAJIMA, YOSHIKAZU
Executed: 2005-05-06
Assignee
CANON KABUSHIKI KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Positioning Apparatus, Exposure Apparatus, and Device Manufacturing Method