Patent Assignment
Reel/Frame 016569/0357
Assignment of Assignor's Interest
Recorded: 2005-05-16
Pages: 4
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Phase Shifting Interferometric Method, Interferometer Apparatus and Method of Manufacturing an Optical Element
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.