Patent Assignment
Reel/Frame 016572/0866
Assignment of Assignor's Interest
Recorded: 2005-05-12
Pages: 2
Assignors
RAU, JOHANNES
Executed: 2005-05-03
SCHOEPPACH, ARMIN
Executed: 2005-04-24
WEBER, ULRICH
Executed: 2005-04-25
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Objective with at Least One Optical Element
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.