Patent Assignment
Reel/Frame 016579/0429
Assignment of Assignor's Interest
Recorded: 2005-05-17
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.