Patent Assignment
Reel/Frame 016584/0990
Assignment of Assignor's Interest
Recorded: 2005-05-18
Pages: 2
Assignors
EUSSEN, EMIEL JOZEF MELANIE
Executed: 2005-05-11
BEEMS, MARCEL HENDRIKUS MARIA
Executed: 2005-05-11
VAN DER PASCH, ENGELBERTUS ANTONIUS FRANSISCUS
Executed: 2005-05-11
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Lithographic Interferometer System with an Absolute Measurement Subsystem and Differential Measurement Subsystem and Method Thereof
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.