Patent Assignment
Reel/Frame 016591/0540
Assignment of Assignor's Interest
Recorded: 2005-05-19
Pages: 2
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU, 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method Which Performs Predetermined Processing on a Substrate Which Is Positioned Approximately Horizontally at a Substrate Processing Position
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.