Patent Assignment
Reel/Frame 016595/0136
Assignment of Assignor's Interest
Recorded: 2005-05-24
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method and Apparatus for Determining an Etch Property Using an Endpoint Signal