IP Library › Assignment 016597/0008
Patent Assignment
Reel/Frame 016597/0008

Assignment of Assignor's Interest

Recorded: 2005-05-23 Pages: 5
Assignors
SAVAS, STEPHEN E.
Executed: 2005-05-03
HELLE, WOLFGANG
Executed: 2005-05-10
Assignee
MATTSON TECHNOLOGY, INC
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property (1)
System and Method for Removal of Photoresist and Residues Following Contact Etch with a Stop Layer Present
Patent: 7,361,605 →
Application: 11/039,537 →
Publication: US 2005/0196967
Related Assignments (3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Release of Security Interest Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →