Assignment of Assignor's Interest

Recorded: 2005-05-25 Pages: 2

Assignor

EMER, WOLFGANG

Executed: 2005-05-03

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Device and Method for Wavefront Measurement of an Optical Imaging System, and a Microlithography Projection Exposure Machine

Patent: 7,268,890 →

Application: 10/983,593 →

Publication: US 2005/0200940

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.