Patent Assignment
Reel/Frame 016629/0902
Assignment of Assignor's Interest
Recorded: 2005-06-01
Pages: 3
Assignors
NISHI, KENJI
Executed: 2003-06-03
OKUMURA, MASAHIKO
Executed: 2003-06-04
OKUNO, HIROKI
Executed: 2003-06-04
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Exposure Apparatus and Stage Device, and Device Manufacturing Method