Assignment of Assignor's Interest

Recorded: 2005-08-11 Pages: 2

Assignor

GRAEUPNER, PAUL

Executed: 2005-06-24

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STR. 22, OBERKOCHEN, D-73447, GERMANY

Covered Property (1)

Method for Improving an Optical Imaging Property of a Projection Objective of a Microlithographic Projection Exposure Apparatus

Patent: 7,227,616 →

Application: 11/149,568 →

Publication: US 2005/0264780

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.