Patent Assignment
Reel/Frame 016634/0364
Assignment of Assignor's Interest
Recorded: 2005-06-01
Pages: 2
Assignor
YAMAMOTO, TOMOE
Executed: 2005-05-16
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA 211-8668, JAPAN
Covered Property
(1)
Method for Processing Interior of Vapor Phase Deposition Apparatus, Method for Depositing Thin Film and Method for Manufacturing Semiconductor Device
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.