Patent Assignment
Reel/Frame 016637/0797
Assignment of Assignor's Interest
Recorded: 2005-08-15
Pages: 3
Assignor
HILL, HENRY ALLEN
Executed: 2005-06-28
Assignee
ZETETIC INSTITUTE
1665 EAST 18TH STREEET, SUITE 206, TUCSON, ARIZONA, 85719
Covered Property
(1)
Apparatus and Methods for Overlay, Alignment Mark, and Critical Dimension Metrologies Based on Optical Interferometry