Patent Assignment
Reel/Frame 016652/0436
Assignment of Assignor's Interest
Recorded: 2005-08-19
Pages: 3
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Ultraviolet curing process for spin-on dielectric materials used in pre-metal and/or shallow trench isolation applications
Application:
11/146,744 →
Publication:
US 2005/0272220
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.