Patent Assignment
Reel/Frame 016655/0532
Assignment of Assignor's Interest
Recorded: 2005-06-03
Pages: 4
Assignors
TOTZECK, MICHAEL
Executed: 2005-05-20
GEH, BERND
Executed: 2005-05-04
MILLER, SKIP
Executed: 2005-05-04
Assignees
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
CARL ZEISS SMT AG
CARL ZEISS STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.