Patent Assignment
Reel/Frame 016658/0931
Assignment of Assignor's Interest
Recorded: 2005-06-02
Pages: 3
Assignors
CHERALA, ANSHUMAN
Executed: 2005-06-02
SREENIVASAN, SIDLGATA V.
Executed: 2005-06-02
ADUSUMILLI, KRANTHIMITRA
Executed: 2005-06-02
Assignee
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
201 WEST 7TH STREET, 7TH FLOOR, AUSTIN, TEXAS, 78701
Covered Property
(1)
System and Method for Improvement of Alignment and Overlay for Microlithography