Assignment of Assignor's Interest

Recorded: 2005-10-19 Pages: 2

Assignors

GRUNER, TORALF

Executed: 2005-08-26

TSCHISCHGALE, JOERG

Executed: 2005-09-11

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STR. 22, OBERKOCHEN, D-73447, GERMANY

Covered Property (1)

Optical System of a Microlithographic Projection Exposure Apparatus

Patent: 7,423,765 →

Application: 11/190,555 →

Publication: US 2006/0023179

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.