Patent Assignment
Reel/Frame 016666/0498
Assignment of Assignor's Interest
Recorded: 2005-06-20
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
A Post Deposition Plasma Cleaning System and Method