Patent Assignment
Reel/Frame 016666/0786
Assignment of Assignor's Interest
Recorded: 2005-08-24
Pages: 2
Assignor
FIOLKA, DAMIAN
Executed: 2005-08-15
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Beleuchtungseinrichtung einer mikrolithographischen projektionsbelichtungsanlage
Application:
60/698,338 →