IP Library › Patent Application 60698338
Patent Application Provisional
App. No. 60/698,338 · Confirmation No. 7401

Beleuchtungseinrichtung einer mikrolithographischen projektionsbelichtungsanlage

Inventor: Damian Fiolka
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2006-09-05 LET. Miscellaneous Incoming Letter 2 View
2006-09-05 SPEC Specification 11 View
2006-09-05 CLM Claims 3 View
2006-09-05 ABST Abstract 1 View
2005-08-15 PEFN Pre-Exam Formalities Notice 1 View
2005-07-12 TRNA Transmittal of New Application 1 View
2005-07-12 SPECNO Specification - Not in English 21 View
2005-07-12 DRW Drawings-only black and white line drawings 3 View
2005-07-12 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
60/698,338
Filed
2005-07-12