Patent Assignment
Reel/Frame 016677/0007
Assignment of Assignor's Interest
Recorded: 2005-06-08
Pages: 7
Assignors
HIRUKAWA, SHIGERU
Executed: 2005-05-31
MAGOME, NOBUTAKA
Executed: 2005-05-31
TANAKA, ISSEY
Executed: 2005-06-01
Assignee
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO 100-8331, JAPAN
Covered Property
(1)
Exposure Apparatus and Device Manufacturing Method