Patent Assignment
Reel/Frame 016680/0917
Assignment of Assignor's Interest
Recorded: 2005-06-09
Pages: 4
Assignors
HAMADA, YOSHITAKA
Executed: 2005-05-16
OGIHARA, TSUTOMU
Executed: 2005-05-16
IWABUCHI, MOTOAKI
Executed: 2005-05-16
ASANO, TAKESHI
Executed: 2005-05-16
UEDA, TAKAFUMI
Executed: 2005-05-16
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1 OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Sacrificial Film-Forming Composition, Patterning Process, Sacrificial Film and Removal Method