Patent Assignment
Reel/Frame 016684/0407
Assignment of Assignor's Interest
Recorded: 2005-06-10
Pages: 2
Assignee
HYNIX SEMICONDUCTOR, INC.
SAN 136-1, AMI-RI, BUBAL-EUB,, ICHON-SHI, KYOUNGKI-DO 467-860, KOREA, REPUBLIC OF
Covered Property
(1)
Method for Fabricating Semiconductor Device Using Amorphous Carbon Layer as Sacrificial Hard Mask