Patent Assignment
Reel/Frame 016687/0845
Assignment of Assignor's Interest
Recorded: 2005-06-13
Pages: 2
Assignor
NAKATA, TAISAKU
Executed: 2005-05-31
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI, KANAGAWA 211-8668, JAPAN
Covered Property
(1)
Light Exposure Apparatus and Method of Light Exposure Using Immersion Lithography with Saturated Cyclic Hydrocarbon Liquid
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.