Patent Assignment
Reel/Frame 016690/0139
Assignment of Assignor's Interest
Recorded: 2005-06-27
Pages: 3
Assignors
FAGUET, JACQUES
Executed: 2005-04-19
CERIO JR., FRANK M.
Executed: 2005-04-15
MATSUDA, TSUKASA
Executed: 2005-04-18
YAMAMOTO, KAORU
Executed: 2005-04-19
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Enhanced Atomic Layer Deposition System and Method