Patent Assignment
Reel/Frame 016691/0060
Assignment of Assignor's Interest
Recorded: 2005-06-14
Pages: 2
Assignor
SCHARNWEBER, RALF
Executed: 2005-05-31
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Method for a Multiple Exposure, Microlithography Projection Exposure Installation and a Projection System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.