Patent Assignment
Reel/Frame 016705/0110
Assignment of Assignor's Interest
Recorded: 2005-06-16
Pages: 4
Assignors
REICH, JUERGEN
Executed: 2005-06-03
KRUPTESKY, YEVGENY
Executed: 2005-06-03
WOLTERS, CHRISTIAN
Executed: 2005-06-03
Assignee
KLA-TENCOR TECHNOLOGIES CORP.
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Methods and Systems for Determining Drift in a Position of a Light Beam with Respect to a Chuck