Patent Assignment
Reel/Frame 016727/0668
Assignment of Assignor's Interest
Recorded: 2005-06-24
Pages: 3
Assignors
WEISSENRIEDER, KARL-STEFAN
Executed: 2005-05-11
HIRNET, ALEXANDER
Executed: 2005-05-12
PAZIDIS, ALEXANDRA
Executed: 2005-05-02
SCHUSTER, KARL-HEINZ
Executed: 2005-04-27
ZACZEK, CHRISTOPH
Executed: 2005-05-03
LILL, MICHAEL
Executed: 2005-05-03
SCHINK, HARALD
Executed: 2005-05-10
BROTSACK, MARCUS
Executed: 2005-05-04
LOERING, ULRICH
Executed: 2005-05-02
GRUNER, TORALF
Executed: 2005-04-27
SCHEIBLE, GUENTER (LEGAL REPRESENTATIVE OF PATRICK SCHEIBLE, DECEASED)
Executed: 2005-06-14
SCHEIBLE, SIGRID (LEGAL REPRESENTATIVE OF PATRICK SCHEIBLE, DECEASED)
Executed: 2005-06-14
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Projection Objective for Immersion Lithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.