Patent Assignment
Reel/Frame 016733/0010
Assignment of Assignor's Interest
Recorded: 2005-06-27
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Film Formation Apparatus and Method for Semiconductor Process