Patent Assignment
Reel/Frame 016759/0125
Assignment of Assignor's Interest
Recorded: 2005-07-06
Pages: 3
Assignor
OKA, HIROKI
Executed: 2005-06-01
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Semiconductor Processing-Purpose Substrate Detecting Method and Device, and Substrate Transfer System