Patent Assignment
Reel/Frame 016759/0495
Assignment of Assignor's Interest
Recorded: 2005-09-08
Pages: 3
Assignors
RICCI, ANTHONY
Executed: 2005-07-05
TAPPAN, JIM
Executed: 2005-07-05
COMENDANT, KEITH
Executed: 2005-07-05
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Protecting a Bond Layer in a Substrate Support Adapted for Use in a Plasma Processing System