Patent Assignment
Reel/Frame 016760/0834
Assignment of Assignor's Interest
Recorded: 2005-07-08
Pages: 3
Assignors
WEGMANN, ULRICH
Executed: 2005-06-07
SCHELLHORN, UWE
Executed: 2005-07-05
STUEHLER, JOACHIM
Executed: 2005-07-07
HAIDNER, HELMUT
Executed: 2005-06-15
EHRMANN, ALBRECHT
Executed: 2005-06-16
SCHRIEVER, MARTIN
Executed: 2005-06-16
GOEPPERT, MARKUS
Executed: 2005-07-07
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Device and Method for the Optical Measurement of an Optical System by Using an Immersion Fluid
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.