Patent Assignment
Reel/Frame 016802/0721
Assignment of Assignor's Interest
Recorded: 2005-07-21
Pages: 2
Assignors
YAMAGUCHI, ATSUKO
Executed: 2005-05-27
FUKUDA, HIROSHI
Executed: 2005-05-30
KAWADA, HIROKI
Executed: 2005-05-25
MAEDA, TATSUYA
Executed: 2005-05-25
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Evaluation Method of Fine Pattern Feature, Its Equipment, and Method of Semiconductor Device Fabrication
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.