Patent Assignment
Reel/Frame 016804/0735
Assignment of Assignor's Interest
Recorded: 2005-11-21
Pages: 3
Assignors
DYER, THOMAS W.
Executed: 2005-11-14
LI, JINGHONG
Executed: 2005-11-16
LUO, ZHIJIONG
Executed: 2005-11-16
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Method of Ion Implantation of Nitrogen into Semiconductor Substrate Prior to Oxidation for Offset Spacer Formation