Patent Assignment
Reel/Frame 016808/0865
Assignment of Assignor's Interest
Recorded: 2005-11-22
Pages: 5
Assignors
DE JAGER, PIETER WILLEM HERMAN
Executed: 2005-08-09
VAN DEN AKKER, THEODORUS LEONARDUS
Executed: 2005-08-09
VENEMA, WILLEM JURRIANUS
Executed: 2005-08-09
KESSELS, LAMBERTUS GERARDUS MARIA
Executed: 2005-08-09
MULCKHUYSE, WOUTER FRANS WILLEM
Executed: 2005-10-29
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Apparatus and Device Manufacturing Method Utilizing Dynamic Correction for Magnification and Position in Maskless Lithography