Patent Assignment
Reel/Frame 016812/0180
Assignment of Assignor's Interest
Recorded: 2005-07-26
Pages: 2
Assignors
SHIBATA, YUKIHIRO
Executed: 2005-06-30
MAEDA, SHUNJI
Executed: 2005-07-01
OKABE, TAKAFUMI
Executed: 2005-07-04
TAKAHARA, YOICHI
Executed: 2005-07-04
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Inspecting Defects and a System for Inspecting Defects