Patent Assignment
Reel/Frame 016816/0311
Assignment of Assignor's Interest
Recorded: 2005-09-19
Pages: 3
Assignors
DHINDSA, RAJINDER
Executed: 2005-08-10
KOZAKEVICH, FELIX
Executed: 2005-08-10
ROGERS, JAMES H.
Executed: 2005-08-10
TRUSSELL, DAVID
Executed: 2005-08-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Confinement Ring Assemblies Having Reduced Polymer Deposition Characteristics