Patent Assignment
Reel/Frame 016822/0960
Assignment of Assignor's Interest
Recorded: 2005-07-27
Pages: 3
Assignors
ISHIZAKA, TADAHIRO
Executed: 2005-04-08
MATSUDA, TSUKASA
Executed: 2005-04-08
CERIO, JR., FRANK M.
Executed: 2005-04-08
YAMAMOTO, KAORU
Executed: 2005-04-08
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Plasma Enhanced Atomic Layer Deposition System