Patent Assignment
Reel/Frame 016826/0480
Corrected Assignment Resumbitting the Original Cover Sheet Due to Error on the Part of the Applicant Reel/Frame 012986/0717
Recorded: 2005-07-29
Pages: 4
Assignors
SHISHIDO, CHIE
Executed: 2002-03-15
TAKAGI, YUJI
Executed: 2002-03-14
WATANABE, MASAHIRO
Executed: 2002-03-14
YOSHITAKE, MASAHIRO
Executed: 2002-03-14
MATSUMOTO, SHUNICHI
Executed: 2002-03-14
IIZUMI, TAKASHI
Executed: 2002-03-29
KOMURO, OSAMU
Executed: 2002-03-14
TANAKA, MAKI
Executed: 2002-03-14
MOROKUMA, HIDETOSHI
Executed: 2002-03-20
Assignee
HITACHI, LTD.
6, KANDA SURUGADI 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method and System for Monitoring a Semiconductor Device Manufacturing Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.